Research Statement |
| Professor Irene's research interests center on thin films and interfaces that involve microelectronics materials. His group specializes in in situ real-time studies of the kinetics of film formation such as: the oxidation of semiconductors, ion beam sputtering and the chemical vapor deposition of thin films. Film preparation techniques utilize ion beams, plasmas and rapid thermal processes. In situ real-time studies use spectroscopic ellipsometry to determine film growth dynamics and ion scattering and recoil analysis is used for structure and composition while films grow. Optical properties studies of thin films and surfaces are performed using spectroscopic ellipsometry and film morphology studies are performed using transmission and scanning electron and optical microscopy and atomic force microscopy and Fractal analysis. Electrics properties studies are also performed on thin films. |
Education |
| 1969-72 |
Ph.D., Chemistry, Rensselaer Polytechnic Institute, Troy, NY
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| 1959-63 |
B.S., Chemistry, Manhattan College, New York, NY
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Positions |
| 1987-90 |
Vice Chair, Department of Chemistry, University of North Carolina
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| 1982- |
Professor, Department of Chemistry, University of North Carolina
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| 1972-82 |
Research Staff Member, IBM Thomas J. Watson Research Center, Yorktown Heights, NY
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| 1963-69 |
U.S.A.F. Officer
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Selected Honors |
| 2002 |
ISI Highly Cited Researcher
|
| 1998 |
Visiting Fellow, University of Paris, Paris, France, Summer
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| 1997 |
Conference Chair, Second International Conference on Spectroscopic Ellipsometry, Charleston SC
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| 1997 |
Fellow of American Vacuum Society
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| 1995 |
Visiting Fellow Ecole Central de Lyon, Lyon , France, Summer
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| 1988 |
Callinan Award, Electrochemical Society
|
| 1980 |
IBM Invention Achievement Award
|
| 1969 |
Bronze Star Medal
|
